| Referências: |
1. M. OHRING, Materials Science of Thin Films, Academic Press, 2001
2. B. CHAPMAN, Glow Discharge Processes: Sputtering and Plasma Etching, John Wiley & Sons,
1980.
3. SMITH, D. L. Thin-Film Deposition: principles & practice, McGraw Hill, (1995).
4. FREUND, L. B., SURESH, S. Thin Film Materials: Stress, Defect Formation and Surface
Evolution. Cambridge University Press (2009).
5. OHRING, M. Materials Science of Thin Films: Deposition and Structure, Academic Press
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6. SORIAGA, M P; STICKNEY, J; BOTTOMLEY |
